Abstract: A semiconductor device and a method for forming it are described. The semiconductor device comprises a metal NMOS gate electrode that is formed on a first part of a substrate, and a silicide PMOS gate electrode that is formed on a second part of the substrate.
Type:
Grant
Filed:
December 29, 2003
Date of Patent:
December 26, 2006
Assignee:
Intel Corporation
Inventors:
Justin K. Brask, Mark L. Doczy, Jack Kavalieros, Matthew V. Metz, Chris E. Barns, Uday Shah, Suman Datta, Christopher D. Thomas, Robert S. Chau