Patents Represented by Attorney Michael J. Casey

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  • Antifuse with improved on-state reliability
    Patent number: 6033938
    Abstract: Treatment of the positive electrode interface of an antifuse provides significantly improved on-state reliability. Treatments include, but are not limited to, a plasma etch using carbon tetrafluoride (CF.sub.4), a sputter clean using Argon, and wet chemical treatments using dimethyl formamide (and water) or a resist developer.
    Type: Grant
    Filed: November 15, 1996
    Date of Patent: March 7, 2000
    Assignee: Xilinx, Inc.
    Inventors: Martin L. Voogel, Yakov Karpovich, Michael J. Hart