Abstract: The programmable logic of a programmable device is sectioned into four logic regions. Each logic region includes logic elements and a programmable interconnect structure employing antifuses for programmably interconnecting selected ones of those logic elements. Programming conductors for supplying programming current to antifuses of a logic region extend across the logic region but do not extend across other logic regions. Similarly, programming control conductors that control programming transistors of the logic region extend across the logic region but do not extend across other logic regions. The programmable device structure allows four antifuses to be programmed simultaneously, one antifuse in each logic region. An antifuse can be selected for simultaneous programming from a logic region, irrespective of the other three antifuses that are or may be selected for simultaneous programming from the other three logic regions.
Abstract: A linear amplifier provides an output signal that is proportional to an input signal. A differential voltage control unit tracks the output signal voltage and controls the outputs of two pulse width modulators which drive a linear amplifier. The differential voltage control unit controls the output of the positive pulse width modulator to a fixed predetermined value in accordance with at least one of the input or output signals. The positive and negative pulse width modulators are driven by a positive and negative high voltage direct current power supplies respectively.
Abstract: A laser chamber has angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves.
Type:
Grant
Filed:
March 6, 1998
Date of Patent:
November 2, 1999
Assignee:
Cymer, Inc.
Inventors:
Tibor Juhasz, Richard C. Ujazdowski, Herve A. Besaucele, Robert G. Ozarski, James H. Azzola