Abstract: A system and method for two-sided etch of a semiconductor substrate. Reactive species are generated and flowed toward a substrate for processing. A diverter is positioned between the generation chamber and the substrate. A portion of the reactive species flows through the diverter for processing the front of the substrate. Another portion is diverted around the substrate to the backside for processing. A flow restricter is placed between the substrate and the exhaust system to increase the residence time of reactive species adjacent to the backside.

Abstract: A system and method for providing improved virtual sound images. One or more spatial cues of an audio signal may be modulated within a described range to increase the clarity and perceived localization of a virtual sound image. Interaural time delay, interaural intensity difference and/or spectra may be varied at below the “just noticeable level” to cause the virtual source location to move slightly relative to the listener's head. Such variation assists the listener's auditory system in filtering out ambiguous spatial cue information from the audio signal. The resulting virtual sound image has a larger sweet spot and is less sensitive to head movement.

Abstract: A thermal processing system and method for processing a semiconductor substrate. A lamp system radiates through a window to heat the substrate. A dual gas manifold provides purge gas through a top showerhead to prevent deposits on the window and provides gas through a lower showerhead to deposit a material on the substrate. A thin support and a radiative cavity with thin radiation shields is used to support and insulate the substrate. A peripheral heater also heats the edges to enhance uniformity. An opaque quartz liner is used to reduce contaminants and undesired deposits and simplify cleaning.

Abstract: Apparatus and method for an improved etch process. A power source alternates between high and low power cycles to produce and sustain a plasma discharge. Preferably, the high power cycles couple sufficient power into the plasma to produce a high density of ions (≳1011cm−3) for etching. Preferably, the low power cycles allow electrons to cool off to reduce the average random (thermal) electron velocity in the plasma. Preferably, the low power cycle is limited in duration as necessary to prevent excessive plasma loss to the walls or due to recombination of negative and positive ions. It is an advantage of these and other aspects of the present invention that average electron thermal velocity is reduced, so fewer electrons overcome the plasma sheath and accumulate on substrate or mask layer surfaces. A separate power source alternates between high and low power cycles to accelerate ions toward the substrate being etched. In one embodiment, a strong bias is applied to the substrate in short bursts.

Abstract: A method for in-situ cleaning of a hot wall RTP system. Internal components are heated to high temperatures above 500° C. A halocarbon gas, inert gas and oxidizing gas are flowed through the reactor for a period which may exceed 20 minutes and then purged to remove contaminants.

Abstract: Thermoplastic sheet comprising plasticized polyvinyl butyral has a regular pattern of ridges and channels integrally formed and arranged in each face at an angle of intersection with respect to each other of at least 25 degrees, the ridges tapering to flattened V-shaped peaks of tight radius of less than 0.0034 inch, each face of the sheet having a surface permanence of at least 70%.

Abstract: A method of preparing a prelaminate for a safety glazing which involves providing a thermoplastic interlayer having a first air removal surface which includes a multiplicity of microscopic embossments of substantially identical shape integrally projecting from the plane of one side of the interlayer in a regular pattern of rows and a second air removal surface on the other side of the interlayer which is different from the first air removal surface and includes a multiplicity of microscopic peaks and valleys of varying heights and depths arranged in an irregular, non-linear pattern, interposing the interlayer between two layers of glass and deairing the interfaces with the glass layers during which the first air removal surface is partially transferred to and imposed on the second air removal surface to provide deair paths of reduced obstruction.

Abstract: A method of improving the strength properties of acrylic-based pressure sensitive resins exposed to sterilizing radiation by using, during interpolymerization of the monomers of the resin, an amount of chain transfer agent adequate to reduce the gel content of the resin to an extent effective to counteract the gain in gel content occurring after exposure to such radiation. The gel content of the resin composition, as made, is no more than about 2.0%.

Abstract: A method of embossing thermoplastic sheet by continuously advancing thermoplastic sheet through an embossing nip defined by a rotating embossing roll with an engraved surface at elevated embossing temperature and an opposite fixed rigid concave member and pneumatically forcing the sheet against the engraved surface while within and continuously passing through the nip.

Abstract: An apparatus for continuously stretching a web of thermoplastic sheet into an arcuate form of desired curvature for manufacturing laminated windshields. The apparatus comprises conventional heating rolls, but employs at least two adjustable multispoke pyramids, one hot setting pyramid and one cooling pyramid which are separated by a wall incorporating a folding bar.

Abstract: A cleaning solution consisting essentially of dimethyl ester, water and one or more organic solvents completely miscible at 23.degree. C. with dimethyl ester and water, said water present at at least ten weight percent based on the weight of solution components.

Abstract: An apparatus and method for continuously stretching a web of thermoplastic sheet into an arcuate form of desired curvature for the manufacture of laminated windshields. The apparatus includes conventional heating rolls, but employs at least two adjustable multispoke pyramids, one hot setting pyramid and one cooling pyramid which are separated by a wall incorporating a folding bar. The method relates to the manufacture of cut shaped blanks wherein hot setting and cooling steps are physically separated. Residual snap back after hot setting is released prior to the cooling step.

Abstract: Aqueous latices adapted to forming visible light transparent, coherent polymeric films, e.g. in laminates, as protective coatings or as adhesives, comprising colloidal particles of a UV-absorbing polymer less than 5 micrometers in diameter. Useful UV-absorbing polymer include homopolymers and copolymers of vinyl-functionalized monomer of benzotriazole or benzophenone and mixtures with plasticizer and/or coalescing agent. Plasticizer and coalescing agents are useful for providing polymer with reduced glass transition temperature to facilitate coalescence of polymer particles into coherent films. Useful additives for the latices of this invention include wetting agents, surfactants, and crosslinking agents, anti-oxidants and radical scavengers. The latices of this invention are particularly useful in providing clear, thin coatings on windows, tags, labels, flooring, tents, awnings, containers and other UV-susceptible substrates.

Abstract: Liquid hardeners for soil grouting formulations having an acid content no more than 0.1 mg KOH per gm in the form of dimethyl ester mixtures of dimethyl succinate, dimethyl glutarate and dimethyl adipate at a concentration in the mixtures lying within a bounded area in the graph of the drawing of the specification.

Abstract: There are disclosed novel water-soluble metal working fluids comprising polyaspartic acid and salts thereof useful as a lubricant in process to cut, bend, grind and shape both ferrous and non-ferrous metal. The polyaspartic acid and salts thereof are particularly advantageous in that the fluids can be easily disposed of after use without special treatment because polyaspartic acid and salts thereof are readily biodegradable.

Abstract: A pressure-sensitive coating composition of an organic solvent solution of i) an acrylic copolymer containing carboxyl or hydroxyl groups; and ii) 0.1 to 15% by weight, based on the weight of i), of styrene-maleic copolymer.

Abstract: In preparing rough-surfaced sheet of polyvinyl butyral (PVB), a fraction of stiffly resilient particles of crosslinked PVB are present in the formulation which on exiting an extrusion die opening mechanically interfere with and roughen the surface of the sheet being formed.

Abstract: There is disclosed a process for preparing polysuccinimides by the thermal condensation of amino acids such as L-aspartic acid in high boiling organic reaction medium whereby a polymer is provided having highly desirable color characteristics. The organic medium is selected from high boiling alkyl alcohols having from 7 to 14 carbon atoms such as isodecanol and high boiling alkanes having from 10 to 20 carbon atoms such as dodecane. The organic medium can be employed in conjunction with acid catalysts for the condensation reaction and can be easily recovered for reuse with little or no need for purification.

Abstract: A plastic sheet, preferably of plasticized partial polyvinyl butyral, for a laminated safety glazing, having means dispersed on its surface, preferably comprising a multiplicity of spaced projections, capable of resisting adhesion to a rigid panel, such as glass, of such a glazing when the sheet is laminated to the panel, the area of the sheet surface without such dispersed means having high affinity for adhesion. The projections physically block adhesion of a dispersed area of the sheet to the panel in that the means on the sheet surface have no or weak interfacial adhesion. The multiplicity of space projections also have low or no affinity for adhesion when in blocking contact with each other or with another plasticized partial polyvinyl butyral surface and thereby increase blocking resistance.

Abstract: A no autoclave process for forming a safety laminate which involves interposing a plasticized polyvinyl butyral sheet having a water content of 0.2 weight percent or more between a pair of glass layers to form a laminate assembly, enclosing at least the edges of the assembly in a sealed space, subjecting the sealed space to vacuum to deair the laminate assembly, heating the deaired laminate assembly to a temperature sufficient to seal the edges of the glass layers and plasticized polyvinyl butyral sheet and then subjecting the laminate assembly to a temperature and for a time sufficient to bond the glass layers to the sheet while reducing the vacuum to an extent effective to counteract water bubble formation in the sheet to form a safety laminate meeting the American National Standards Code for Safety Glazing Materials.