Patents Represented by Attorney, Agent or Law Firm Michael N. Miller
  • Patent number: 6431005
    Abstract: A pressure sensor cell has a substrate including at least a first electrode and a deformable membrane. The membrane is fixed by its peripheral edge to the substrate and is spaced from the substrate to define a closed chamber around at least a part of the first electrode. A second electrode is provided formed on a wall of the membrane. The second electrode faces the first electrode and is kept separate from the first electrode if no pressure is exerted on the membrane. Finally, an electronic circuit is placed in the substrate under the first electrode.
    Type: Grant
    Filed: April 15, 1998
    Date of Patent: August 13, 2002
    Assignee: Commissariat a l'Energie Atomique
    Inventor: Marie-Thérèse Delaye