Abstract: An adjustable polarized goggle provides for simple adjustment of the intensity of transmitted light with a mittened or gloved hand in a simple design having only three polarized elements. A continuous rounded common polarized element comprises the outer lens of the goggle and two coupled, rotatable, polarized elements inside the lens are disposed at an angle from one another to provide a compact shape conforming to the shape of a head. A foam liner traps an air volume between the polarized elements to reduce condensation.

Abstract: A method for purging a vacuum chamber suitable for use in the production of integrated circuit structures on semiconductor wafers. The method comprises providing the chamber to be purged and flowing a heated, non-reactive gas, such as argon gas, through the chamber. The non-reactive gas is heated to a temperature of at least 90.degree. C. Further, the chamber is heated to maintain it at a temperature of at least 90.degree. C. while flowing the gas therethrough. Flowing the heated non-reactive gas through the chamber causes released impurities or contaminants to be efficiently swept from the chamber in the non-reactive gas flow. After flowing the heated gas through the heated chamber, the flow of gas is interrupted and the chamber, while still hot, is pumped down to a vacuum of about 5.times.10.sup.-7 to determine whether or not the chamber has a leakage problem.