Abstract: A dummy structure pattern for fabricating a substantially planar surface within an inactive region of a semiconductor topography is provided. In particular, a semiconductor topography is provided which includes an inactive region comprising a sacrificial annular dummy structure configured to surround an area larger than a square of a minimum critical dimension of a device arranged within an active region of the semiconductor topography. In a preferred embodiment, the area is exclusively designated for a formation of an isolation structure within the semiconductor substrate of the semiconductor topography. As such, a semiconductor topography is provided which includes a separate isolation structure arranged within a spacing of a contiguous isolation structure, which is arranged in a grid pattern within a portion of a semiconductor substrate. Moreover, a semiconductor device is provided which includes an inactive region with a plurality of similarly sized and uniformly arranged annular diffusion regions.