Abstract: A process of selectively etching a sacrificial light absorbing material (SLAM) over a dielectric material, such as carbon doped oxide, on a substrate using a plasma of a gas mixture in a plasma etch chamber. The gas mixture comprises a hydrofluorocarbon gas, an optional hydrogen-containing gas, an optional fluorine-rich fluorocarbon gas, a nitrogen gas, an oxygen gas, and an inert gas. The process could provide a SLAM to a dielectric material etching selectivity ratio greater than 10:1.

Abstract: A process of selectively etching a sacrificial light absorbing material (SLAM) over a dielectric material, such as carbon doped oxide, on a substrate using a plasma of a gas mixture in a plasma etch chamber. The gas mixture comprises a hydrofluorocarbon gas, an optional hydrogen-containing gas, an optional fluorine-rich fluorocarbon gas, a nitrogen gas, an oxygen gas, and an inert gas. The process could provide a SLAM to a dielectric material etching selectivity ratio greater than 10:1.

Abstract: Embodiments of methods for fabricating a spacer structure on a semiconductor substrate are provided herein. In one embodiment, a method for fabricating a spacer structure on a semiconductor substrate includes providing a substrate containing a base structure over which the spacer structure is to be formed. The spacer structure may be formed over the base structure by depositing a first layer comprising silicon nitride on the base structure, depositing a second layer comprising a silicon-based dielectric material on the first layer, and depositing a third layer comprising silicon nitride on the second layer. The first, second, and third layers are deposited in a single processing reactor.

Abstract: Network channel access protocol is disclosed. More particularly, a distributed, locally determined, channel access protocol that adapts to load, avoids interference and controls access by a group of nodes to a set of shared channels is disclosed. Shared channel space is divided into a number of communication slots that are repeated at a predetermined interval. Permission to use a slot to communicate between any two nodes is dynamically adjusted by the channel access protocol, which locally: (i) estimates load to neighboring nodes; (ii) allocates or deallocates slot usage to adapt to load and avoid interference; and (iii) asserts and advertises slot usage within an interference area about itself.

Abstract: Method, apparatus, and computer readable medium for functionally verifying a physical device under test (DUT) is described. In one example, verification test data is generated for the physical DUT using a constraint-based random test generation process. For example, the architecture, structure, and/or content of the verification test data may be defined in response to constraint data and an input/output data model. A first portion of the verification test data is applied to the physical DUT. Output data is captured from the physical DUT in response to application of the first portion of the verification test data. A second portion of the verification test data is selected in response to the output data. Expected output data for the physical DUT associated with the verification test data may be generated and compared with the output data captured from the DUT to functionally verify the design of the DUT.

Abstract: A method and apparatus for controlling when a calibration cycle is started for a metrology tool. The method and apparatus exploits a correlation between a drift of a first parameter (e.g., film thickness measurement drift) and a drift of a second parameter (e.g., CD measurement drift). One embodiment of the method comprises measuring a film thickness on one or more reference substrates to determine when a drift component of these measurements exceeds a pre-determined range and thereafter calibrating the metrology tool when the drift component of the film thickness measurements exceeds the pre-determined range. Generally, the drift of the film thickness measurement will occur prior to substantial drift of the CD measurement occurring.

Abstract: The present invention includes a process for selectively etching a low-k dielectric material formed on a substrate using a plasma of a gas mixture in a plasma etch chamber. The gas mixture comprises a fluorine-rich fluorocarbon or hydrofluorocarbon gas, a nitrogen-containing gas, and one or more additive gases, such as a hydrogen-rich hydrofluorocarbon gas, an inert gas and/or a carbon-oxygen gas. The process provides a low-k dielectric to a photoresist mask etching selectivity ratio greater than about 5:1, a low-k dielectric to a barrier/liner layer etching selectivity ratio greater about 10:1, and a low-k dielectric etch rate higher than about 4000 ?/min.

Abstract: Method and apparatus for location-based triggering in a mobile receiver is described. In one example, a triggering region is designated. Expected pseudorange data is generated within the mobile receiver and pseudoranges to a plurality of satellites are measured. A delta position is computed with respect to a virtual center of the triggering region using satellite trajectory data, the measured pseudoranges, and the expected pseudoranges. The delta position is compared with the radius restriction value, the results of which may be used to trigger an event. In another example, expected pseudorange data is obtained at the mobile receiver. Pseudoranges from the mobile receiver to a plurality of satellites are measured. The measured pseudoranges and expected pseudoranges are compared using a metric to produce delta values. The delta values are compared with a radius restriction value, the results of which may be used to trigger an event.

Abstract: Method and apparatus for processing position information in a mobile device is described. In one example, a request for a position to be computed within a predefined period of time is received. A plurality of positions is calculated within the predefined period of time. At least one of the plurality of positions is cached in a position cache. Accuracy data is derived with respect to at least one of the plurality of positions. A best position stored in the position cache is identified in response to the accuracy data. The best position may be sent to a server in communication with the mobile device.

Abstract: A method and apparatus for mitigating multipath effects in a satellite signal receiver is described. The method includes computing at least one pseudorange residual as a function of (i) a measured pseudorange to a given satellite, and (ii) an expected pseudorange to the given satellite, which is derived by mathematically projecting a pseudorange to the given satellite. The method also includes applying the measured pseudorange to a sequential-estimation filter, which is configured to solve a navigation-solution problem, when the pseudorange residual satisfies a given threshold.

Abstract: A method and apparatus for determining time-of-day in a mobile receiver is described. In one example, expected pseudoranges to a plurality of satellites are obtained. The expected pseudoranges are based on an initial position of the mobile receiver and an initial time-of-day. Expected line-of-sight data to said plurality of satellites is also obtained. Pseudoranges from said mobile receiver to said plurality of satellites are measured. Update data for the initial time-of-day is computed using a mathematical model relating the pseudoranges, the expected pseudoranges, and the expected line-of-sight data. The expected pseudoranges and the expected line-of-sight data may be obtained from acquisition assistance data transmitted to the mobile receiver by a server. Alternatively, the expected pseudoranges may be obtained from acquisition assistance data, and the expected line-of-sight data may be computed by the mobile receiver using stored satellite trajectory data, such as almanac data.

Abstract: Method and apparatus for locating position of a satellite signal receiver is described. In one example, pseudoranges are obtained that estimate the range of a satellite signal receiver to a plurality of satellites. An absolute time and a position are computed using the pseudoranges at a first time. The absolute time is then used to compute another position at a subsequent time. In another example, a plurality of states associated with a satellite signal receiver are estimated, where the plurality of states includes a time tag error state. A dynamic model is then formed relating the plurality of states, the dynamic model operative to compute position of the satellite signal receiver.

Abstract: The cylinder includes a core and a coating covering most of the core. The core is made from a heat-resistant or insulating material. The core has inner and outer side walls and opposing first and second ends. The outer side wall is further away from a central longitudinal axis of the cylinder than the inner wall. The first end is configured to contact an edge ring that supports a semiconductor substrate. The coating is substantially opaque to infrared radiation, and covers all external surfaces of the core except for the first end. The core is preferably made from quartz or ceramics, while the coating is preferably made from a polysilicon.

Abstract: A method and apparatus for compensating an oscillator in a location-enabled wireless device is described. In an example, a mobile device includes a wireless receiver for receiving wireless signals and a GPS receiver for receiving GPS signals. The mobile device also includes an oscillator having an associated temperature model. A frequency error is derived from a wireless signal. The temperature model is adjusted in response to the frequency error and a temperature proximate the oscillator. Frequency error of the oscillator is compensated using the adjusted temperature model. In another example, a frequency error is derived using a second oscillator within the wireless receiver.

Abstract: A method of plasma etching a layer of dielectric material having a dielectric constant that is greater than four (4). The method includes exposing the dielectric material layer to a plasma comprising a hydrocarbon gas and a halogen containing gas.

Abstract: Method and apparatus for receiving an estimate of time in a satellite signal receiver receives an estimate of time from a server and compensates for error of a clock in the satellite signal receiver using the estimate of time. The output of the compensated clock is used when computing a position of the satellite signal receiver. The estimate of time is received using a network time protocol (NTP), a simple network time protocol (SNTP), or by one-way broadcast from the server.

Abstract: Embodiments of the invention provide methods for evaluating the accuracy of a molecular model properties model (or predictions generated using a molecular properties model). The accuracy of a molecular properties model may be evaluated using three general approaches, (i) by using the same data set to both train the model and to estimate the accuracy of the model, (ii) by using distinct data sets to train and subsequently test a model, and (iii) by using multiple models (or sets of predictions).

Abstract: A method and apparatus for performing signal correlation is described. In one example, portions of a pseudorandom reference code are multiplied with portions of a repeating code of the digital signal to produce a plurality of inner products. The plurality of inner products are then integrated over a period less than a period of the repeating code to produce a correlation result with a broadened frequency response. In another example, the digital signal is correlated with a pseudorandom reference code to produce a first correlation. The digital signal is then correlated with the pseudorandom code reference code to produce a second correlation. The first and second correlations are then used to determine first and second signal delays. The frequency shift of the digital signal is computed using a difference between the first and second signal delays over time.

Abstract: Some embodiments of the invention provide a system for tracking utilization of resources of computers. This system includes several client computers, where each computer has one or more resources that the system tracks. The system also includes a client application for each client computer. Each client application collects utilization duration data relating to the utilization of the resources of its corresponding client computer. The system further includes an application server that receives the utilization duration data collected by the client applications and stores the received data in a storage structure. In certain embodiments, the collected duration data includes time periods that the client applications measure. The application server then aggregates and/or stores the collected time periods.

Abstract: A satellite signal receiver is described. A front end receives a satellite signal. A sampling circuit digitizes the satellite signal, where the digitized signal has either a first sample spacing or a second sample spacing. A mode selection process selects either the first sample spacing or the second sample spacing. A processor performs at least a subset of a convolution between a pseudorandom reference code and the digitized signal.