Abstract: Embodiments of the present invention provide a process sequence and related hardware for filling a patterned feature on a substrate with a metal, such as copper. The sequence comprises first forming a reliable barrier layer in the patterned feature to prevent diffusion of the metal into the dielectric layer through which the patterned feature is formed. One sequence comprises forming a generally conformal barrier layer over a patterned dielectric, etching the barrier layer at the bottom of the patterned feature, depositing a second barrier layer, and then filling the patterned feature with a metal, such as copper.

Abstract: A symmetric monitor calibrator for mounting on a cathode ray tube or monitor with a surface. The calibrator has a case that holds electronic and optic components. Suction cups hold the calibrator to the surface, in which the suction cups are attached to the end of supporting elements that surround the case. At least three supporting elements with a common connecting point to form one support structure are connected to the top of the case. The supporting elements extend out creating a greater diameter than the case. The supporting elements and therefore suction cups uniformly surround the center point of the case to prevent rotation caused by the effects of gravity.

Abstract: Methods system and apparatus, including computer program products, for monitoring polishing a substrate. A polishing pad mounted on a platen, is rotated at a first rotation rate, and a carrier head is rotated at a second rotation rate that is different from the first rotation rate. The carrier head carries a substrate and presses the substrate against the polishing pad. A sequence of data traces is acquired using a sensor mounted in the platen, wherein each data trace results from a separate scan with the sensor along a path across the substrate, and wherein the first and second rotation rates are such that a plurality of paths corresponding to a predetermined number of consecutive scans are substantially evenly radially distributed across the substrate.

Abstract: Method and apparatus for etching a metal layer disposed on a substrate, such as a photomask, are provided. In one aspect, a method is provided for processing a substrate including positioning the substrate in a processing chamber, introducing a processing gas comprising (i) hydrogen chloride, (ii) an oxygen containing gas, (iii) another chlorine containing gas, and optionally, (iv) an inert gas into the processing chamber, wherein the substrate is maintained at a reduced temperature, and the processing gas is excited into a plasma state at a reduced power level to etch exposed portions of the metal layer disposed on the substrate.

Abstract: A connector for connection of a pipe end portion of coiled tubing adapted for connecting a piece of downhole equipment. The connector is formed by three separate parts that can be screwed together two and two, of which a radially inner shrinkable adapter sleeve compressively surrounded by an elongate outer adapter and connector sleeve ensures the securing of the end portion of the coiled tubing, whereas a freely projecting, internally threaded end portion of the outer sleeve ensures the connection to the remaining part of the connector in the screwing together. The connector, besides exhibiting improved tensile, flexural and compressive strength properties, is also well suited to absorb torques applied.

Abstract: Compositions and methods for removal of barrier layer materials by a chemical mechanical polishing technique are provided. In one aspect, the invention provides a composition adapted for removing a barrier layer material in a chemical mechanical polishing technique including at least one reducing agent selected from the group of bicarboxylic acids, tricarboxylic acids, and combinations thereof, at least one reducing agent selected from the group of glucose, hydroxylamine, and combinations thereof, and deionized water, wherein the composition has a pH of about 7 or less. The composition may be used in a method for removing the barrier layer material including applying the composition to a polishing pad and polishing the substrate in the presence of the composition to remove the barrier layer.

Abstract: An optical detection system for forming an image of a field of view in an object plane onto an image plane in which the electromagnetic radiation image is transmitted to a detector array at the image plane via an optical distorting element such as a reflector 11, so as to impose a non linear relationship between areas in the image and object planes.

Abstract: Optimizers must work with numeric data from a variety of sources including column statistics, estimated filter factors, record counts estimated costs and the like. Embodiments provided herein define and represent any such numeric measurements as a Vector of N dimensions, where n is a number of aspects of measurements that a particular optimizer is configured to consider. A particular embodiment provides a 4-dimensional vector where the dimensions represent magnitude, confidence, variance interval, and penalty. Examples of measurements considered by the optimizer, and which may be represented as a vector, include cost, estimated selectivity of a predicate, estimated number of records returned from part or all of a query, estimated record fanout when joining one file to another, etc.

Abstract: An apparatus for facilitating the connection of tubulars using a top drive, the apparatus comprising a supporting member (13) connectable to said top drive (3) characterized in that it further comprises an internal tool (30) for engaging said tubular (7) and an external clamping device (39) for engaging said tubular (7).

Abstract: The present invention generally provides methods, systems and articles of manufacture for programmatically providing a user interface for creating queries. In one embodiment, the graphical user interface comprises (i) a region for displaying conditions of a user-defined query; and (ii) a graphical element for initiating a process of applying an event profile to a first condition of the query, whereby results returned by execution of the query are restricted to those for which the first condition and a second condition defined by the event profile are contemporaneously true.

Abstract: Embodiments of the present invention relate to an apparatus and method of plasma assisted deposition by generation of a plasma adjacent a processing region. One embodiment of the apparatus comprises a substrate processing chamber including a top shower plate, a power source coupled to the top shower plate, a bottom shower plate, and an insulator disposed between the top shower plate and the bottom shower plate. In one aspect, the power source is adapted to selectively provide power to the top shower plate to generate a plasma from the gases between the top shower plate and the bottom shower plate. In another embodiment, a power source is coupled to the top shower plate and the bottom shower plate to generate a plasma between the bottom shower plate and the substrate support.

Abstract: The present invention generally is directed to a system, method and article of manufacture for accessing data independent of the particular manner in which the data is physically represented. In one embodiment, a data repository abstraction layer provides a logical view of the underlying data repository that is independent of the particular manner of data representation. A query abstraction layer is also provided and is based on the data repository abstraction layer. A runtime component performs translation of an abstract query into a form that can be used against a particular physical data representation.

Abstract: A method and apparatus for transport encoded asset data and content data, multiplexing the transport encoded content data with a plurality of NULL transport packets to provide “place holder” for the asset data transport packets, and replacing the NULL transport packets with asset data transport packets prior to transmitting the multiplexed transport stream to a set top box.

Abstract: A method of improving performance of an optical amplifier and an optical fiber amplifier including an optical fiber having a zero-dispersion wavelength, and at least one Raman pump that provides pump power to the optical fiber at a predetermined wavelength to allow transfer of at least a portion of the pump power to a first adjacent wavelength that is less than the zero-dispersion wavelength, and to a second adjacent wavelength that is greater than the zero-dispersion wavelength.

Abstract: Embodiments of a polishing article for processing a substrate are provided. In one embodiment, a polishing article for processing a substrate comprises a fabric layer having a conductive layer disposed thereover. The conductive layer has an exposed surface adapted to polish a substrate. The fabric layer may be woven or non-woven. The conductive layer may be comprised of a soft metal and, in one embodiment, the exposed surface may be planar.

Abstract: The present invention generally relates to a sealing apparatus for isolating a wellbore. In one aspect, the present invention provides an expandable sealing apparatus having an expandable tubular and a sealing element disposed around the tubular. A chamber for maintaining a fluid is defined between the sealing element and the tubular. The sealing apparatus also includes a self-isolating layer disposed in the chamber, wherein the self-isolating layer is adapted and arranged to regulate fluid flow through the chamber. Fluid supplied to the chamber may inflate the sealing element, thereby urging the sealing element into contact with the wellbore. When the pressure in the tubular is released, the pressure in the chamber causes the self-isolating layer to close off, thereby retaining the pressure in the chamber.

Abstract: Apparatus and method for performing fast arithmetic operations, including addition, in a pipelined circuit. In one embodiment, the apparatus comprises a plurality of gates, the critical path through the plurality of gates being three gates delays for some embodiments. The apparatus may comprise: a first level of logic for receiving at least two binary numbers and generating multi-bit P, G, Z, and K carry signals; a second level of logic receiving the multi-bit P, G, Z, and K carry signals and generating multi-bit section-based carry signals; and a third level of logic receiving the multi-bit section-based carry signals and generating a sum of the received binary numbers, the third level of logic comprising: a plurality of domino logic gates forming sum bits using the multi-bit section-based P, G, Z, and K carry signals.

Abstract: A method for forming a conductive feature in a low k dielectric layer comprising a layer of nanotubes and a low k material between the nanotubes is provided. The low k dielectric layer may be deposited on a seed layer as a blanket layer that is patterned such that a conductive feature may be formed in the low k dielectric layer. Alternatively, the low k dielectric layer may be selectively deposited on a patterned seed layer between a sacrificial layer of a substrate. The sacrificial layer may be removed and replaced with conductive material to form a conductive feature in the low k dielectric layer.