Patents Represented by Attorney, Agent or Law Firm Moser, Ritterson, Sheridan, L.L.P.
  • Method and apparatus for testing a substrate
    Patent number: 6730906
    Abstract: A method and apparatus for testing a substrate, wherein a particle beam is directed onto the substrate and emitted secondary particles are detected with a detector and then evaluated. The location of the site at which the secondary particles are emitted on the substrate relative to the position of the detector is taken into consideration during testing.
    Type: Grant
    Filed: October 15, 2001
    Date of Patent: May 4, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Matthias Brunner, Ralf Schmid