Patents Represented by Attorney, Agent or Law Firm Nixion Peabody LLP
  • Semiconductor device having crystalline silicon clusters
    Patent number: 6252249
    Abstract: A semiconductor device having a plurality of crystalline silicon clusters. The semiconductor device is formed on an insulating surface and includes crystalline silicon clusters anchored with each other with substantially no grain boundary therebetween.
    Type: Grant
    Filed: May 9, 1997
    Date of Patent: June 26, 2001
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki