Abstract: A transducer includes a pneumatic actuator in combination with a stepper motor lifter mechanism to which is opposed an attractive E-I core actuator for precise vertical positioning of a load with minimal transmission of vibration. A typical application is for vertical positioning of a stage in a lithography machine. The use of a stepper motor driving a lead screw and pneumatic actuator together with an attractive E-I core actuator provides a large dynamic range force actuator. The transducer has a sensor which is located spaced away from the E-I core actuator gap and which operates inductively to measure the gap. A compliant diaphragm for the pneumatic actuation allows the load to move a small amount in all six degrees of freedom.