Abstract: A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.
Type:
Grant
Filed:
August 2, 2002
Date of Patent:
August 12, 2003
Assignee:
Arch Specialty Chemicals, Inc.
Inventors:
Christopher S. Blatt, Richard H. Pearce, Graham Williams, Edward H. Wentworth, III