Abstract: Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element (3) having a first axis (3.1) and a holding device (2) that fixes the closing element (3) at least in the direction of the first axis (3.1), the holding device (2) being configured for radial clamping of the closing element (3).

Abstract: A wide area communication network includes at least two hub sites which are interconnected by a communication backbone Each hub site provides wireless coverage in at least one sector. At least two remote sites reside in each sectors and are coupled to a corresponding hub site via a point to multi point broadband wireless system. The network preferably includes at least one service node which is accessible to the remote sites via the hub sites and backbone.

Abstract: A method to achieve a very low effective dielectric constant in high performance back end of the line chip interconnect wiring and the resulting multilayer structure are disclosed. The process involves fabricating the multilayer interconnect wiring structure by methods and materials currently known in the state of the art of semiconductor processing; removing the intralevel dielectric between the adjacent metal features by a suitable etching process; applying a thin passivation coating over the exposed etched structure; annealing the etched structure to remove plasma damage; laminating an insulating cover layer to the top surface of the passivated metal features; optionally depositing an insulating environmental barrier layer on top of the cover layer; etching vias in the environmental barrier layer, cover layer and the thin passivation layer for terminal pad contacts; and completing the device by fabricating terminal input/output pads.

Abstract: There is provided a system for dispensing a plurality of nurser liners one at a time. The system includes a dispenser having a bottom wall with an edge that defines a flap, and a plurality of nurser liners stacked in a nesting arrangement. The flap is adapted to move from a first position to a second position in which the flap exposes an aperture in the bottom wall. Each one of the plurality of nurser liners has a single open end, and the open end has a flexible rim with a diameter greater than that of the aperture. The plurality of nurser liners are positioned so that the rims are adjacent the aperture with a lowermost one of the plurality of nurser liners abutting the edge. Accordingly, the edge acts as a dual-sided guide for deflecting the rim inward of the lowermost nurser liner as the rim passes through the aperture, and restricts the remainder of the plurality of nurser liners from moving with the lowermost nurser liner out of the dispenser to overcome friction forces caused by the nesting arrangement.