Abstract: A charged particle beam writing apparatus includes an input unit configured to input writing data for writing a plurality of cell patterns including at least one cell pattern in which an identifier is added to each of data defining the at least one cell pattern extending over at least two small regions in a plurality of small regions obtained by virtually dividing a writing region, an extraction unit configured to extract the at least one cell pattern to which the identifier is added from the plurality of cell patterns, an output unit configured to output an error result when only one cell pattern is extracted, and a writing unit configured to write the plurality of cell patterns by irradiating a target workpiece with a charged particle beam, based on the writing data for which the error result is not output.
Type:
Grant
Filed:
March 5, 2008
Date of Patent:
May 24, 2011
Assignee:
NuFlare Technology, Inc.
Inventors:
Akihito Anpo, Jun Kasahara, Hitoshi Higurashi, Shigehiro Hara
Abstract: An image forming apparatus includes an image carrier configured to carry an image and a charger to which a direct current voltage overlapped with an AC voltage is applied as a charging bias to charge the image carrier. The charger is positioned in contact or contactlessly with the image carrier. A controller performs an adjustment to the AC voltage multiple times to gradually bring the AC voltage to a target value.