Patents Represented by Attorney Oliver A.M. Zitman

Find this attorney in the Justia Lawyer Directory

  • Apparatus and method for the in-situ generation of dopants
    Patent number: 6001172
    Abstract: A method and apparatus for generating a dopant gas species which is a reaction product of a metal and a gas reactive therewith to form the dopant gas species. A source mass of metal is provided and contacted with the reactive gas to yield a dopant gas species. The dopant gas species may be passed to a chemical vapor deposition reactor, or flowed to an ionization chamber to generate ionic species for ion implantation.
    Type: Grant
    Filed: August 5, 1997
    Date of Patent: December 14, 1999
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Gautam Bhandari, W. Karl Olander, Michael A. Todd, Timothy Glassman