Patents Represented by Attorney Oliver A. Zitzman

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  • Amorphously deposited metal oxide ceramic films
    Patent number: 6133051
    Abstract: A metal oxide ceramic layer is formed from an amorphous film. The metal oxide ceramic layer comprises, for example, a Bi-based oxide ceramic, The amorphous Bi-based metal oxide layer is annealed to transformed it into a ferroelectric layer. A lower thermal budget is needed to transform the amorphous Bi-based metal oxide ceramic into the ferroelectric phase.
    Type: Grant
    Filed: June 30, 1998
    Date of Patent: October 17, 2000
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Frank S. Hintermaier, Bryan C. Hendrix, Jeffrey F. Roeder, Debra A. Desrochers, Thomas H. Baum