Abstract: Hetero-structure semiconductor devices having first and second-type semiconductor junctions are disclosed. The hetero-structures are incorporated into pillar and rail-stack memory circuits improving the forward-to-reverse current ratios thereof.

Abstract: Metal structures for ICs and methods for manufacturing the same are described. The metal structures range from small features to large features and are resistant to peeling problems during heat treatments that occur during the manufacturing process. Peeling of the metal structures from the underlying structures or substrates is reduced or prevented. The peeling problems are reduced or prevented by including a capping layer or capping structure over the dielectric layer over the metal structure and then annealing the capping layer or capping structure, thereby enhancing the adhesion of the metal structure to the underlying structure or substrate.

Abstract: A nonvolatile multibank memory on a die with multiple read, write, and erase circuits, allowing more than one bank to be read, written, erased, or tested independently. Such a multibank memory arrangement is used advantageously in a monolithic three dimensional memory formed above a substrate, leaving unused substrate area available in which the additional circuitry and related cache memory can be formed.

Abstract: A low-density, high-resistivity layer of a PVD sputter-deposited material, preferably titanium nitride, when coupled with a dielectric, makes a superior low-leakage insulating barrier for use in semiconductor devices. The material is created by sputtering methods that cause the ions to strike the deposition surface with reduced energy, for example in an ion metal plasma chamber with no self-bias accelerating ions normal to the deposition surface, or in a standard PVD chamber with pressure increased.

Abstract: A nonvolatile memory array is provided. The array includes an array of nonvolatile memory devices, at least one driver circuit, and a substrate. The at least one driver circuit is not located in a bulk monocrystalline silicon substrate. The at least one driver circuit may be located in a silicon on insulator substrate or in a compound semiconductor substrate.

Abstract: A method to create a low resistivity P+ in-situ doped polysilicon film at low temperature from SiH4 and BCl3 with no anneal required. At conventional dopant concentrations using these source gases, as deposition temperature decreases below about 550 degrees C., deposition rate decreases and sheet resistance increases, making production of a high-quality film impossible. By flowing very high amounts of BCl3, however, such that the concentration of boron atoms in the resultant film is about 7×1020 or higher, the deposition rate and sheet resistance are improved, and a high-quality film is produced.

Abstract: A method of selecting numbers of sub-array groups for simultaneous operation to optimize bandwidth biases a number of sub-array groups and compares a circuit state value, preferably voltage, to a reference parameter to determine if the operation can successfully be preformed for that number of sub-array groups. The comparison may be repeated with ifferent numbers of sub-array groups biased to find the optimum number of sub-array groups for the operation.

Abstract: A three-dimensional, field-programmable, non-volatile memory includes multiple layers of first and second crossing conductors. Pillars are self-aligned at the intersection of adjacent first and second crossing conductors, and each pillar includes at least an anti-fuse layer. The pillars form memory cells with the adjacent conductors, and each memory cell includes first and second diode components separated by the anti-fuse layer. The diode components form a diode only after the anti-fuse layer is disrupted.

Abstract: A method to enhance grain size in polysilicon films while avoiding formation of hemispherical grains (HSG) is disclosed. The method begins by depositing a first amorphous silicon film, then depositing silicon nuclei, which will act as nucleation sites, on the amorphous film. After deposition of silicon nuclei, crystallization, and specifically HSG, is prevented by lowering temperature and/or raising pressure. Next a second amorphous silicon layer is deposited over the first layer and the nuclei. Finally an anneal is performed to induce crystallization from the embedded nuclei. Thus grains are formed from the silicon bulk, rather than from the surface, HSG is avoided, and a smooth polysilicon film with enhanced grain size is produced.

Abstract: Dummy wafers that are used in IC manufacturing and methods for manufacturing the same are described. The dummy wafers are made with an increased resistance to breaking during CVD manufacturing process. The dummy wafers are made by placing a protective film over the wafer surface(s) exposed during the CVD process. By increasing the resistance to breaking, the protective film extends the useful life of the dummy wafers.