Abstract: An improved method and apparatus for drilling vias in electronic substrates with laser pulses is presented which uses one or more tailored pulses to reduce debris remaining in the via while maintaining system throughput and avoiding damage to the substrate. A tailored pulse is a laser pulse that features a power spike having a peak power 10% higher than the average power of the pulse and lasting less than 50% of the duration of the pulse. Methods and apparatuses for creating tailored pulses by slicing longer duration pulses are shown.
Type:
Grant
Filed:
March 24, 2008
Date of Patent:
July 19, 2011
Assignee:
Electro Scientific Industries, Inc.
Inventors:
Yunlong Sun, Weisheng Lei, Hisashi Matsumoto, Brian Johansen, Gregg Hardy, Brian Baird
Abstract: A method and apparatus for filling a via with transparent material is presented, including the steps of providing a panel having a via, occluding the via with transparent material in a workable state so that a portion of the occluding material is internal to the via and a portion of the material is external to said via. The external and internal portions are separated so the transparent filler material, when set, forms a smooth and featureless surface. This causes the filled via to have a substantially even and uniform appearance over a wide range of viewing angles when lit.
Type:
Grant
Filed:
August 20, 2008
Date of Patent:
May 17, 2011
Assignee:
Electro Scientific Industries, Inc.
Inventors:
Glenn Simenson, William Antoni, Steven Cohen, Jeffery Howerton
Abstract: A method and an apparatus for processing workpieces with a laser beam include first and second stages for holding the workpieces and first and second laser beam paths. The first workpiece is loaded upon the first stage, aligned with the first laser beam path, and processing begun. While the first workpiece is aligned in relation to the first laser beam path, the second workpiece is prepared in relation to the second laser beam path. Processing of the second workpiece is begun as soon as the laser beam is available for processing.