Abstract: A multi-blade wafer handling device is provided to concurrently move two or more wafers through a vacuum processing system. The wafer handling device includes two motors magnetically coupled into a transfer chamber to move an arm assembly connected to a dual blade assembly. The preferred wafer handling device includes a first rotating member operated by the first motor, a second rotating member operated by the second motor, a blade assembly having at least first and second wafer blades wherein the wafer blades are co-planar, and an arm assembly connecting the first and second rotating members to the blade assembly.
Type:
Grant
Filed:
November 18, 1996
Date of Patent:
November 17, 1998
Assignee:
Applied Materials, Inc.
Inventors:
Kevin Fairbairn, Christopher Lane, Kelly Colborne, Satish Sundar