Patents Represented by Attorney Patterson, Thuene, Skaar & Christensen PA

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  • 300 mm microenvironment pod with door on side
    Patent number: RE41231
    Abstract: A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
    Type: Grant
    Filed: October 13, 1995
    Date of Patent: April 20, 2010
    Assignee: Entegris, Inc.
    Inventors: Barry Gregerson, Gary Gallagher, Brian Wiseman