Patents Represented by Attorney Patterson, Thunte, Skaar & Christensen, P.A.

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  • Systems and methods for utilizing scanning probe shape characterization
    Patent number: 7578176
    Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: August 25, 2009
    Assignee: Veeco Metrology, Inc.
    Inventors: Tianming Bao, Hao-Chih Liu, Gregory A. Dahlen, Rohit Jain