Patents Represented by Attorney, Agent or Law Firm Pete Scrarbossa
  • Patent number: 6752585
    Abstract: A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to the end effector. The end effector may additionally include a sensor coupled thereto. The sensor is adapted to detect an indicia of orientation of the substrate supported by the end effector. In another embodiment, a method for transferring a substrate includes rotating the substrate disposed on an end effector and detecting an indicia of orientation of the substrate.
    Type: Grant
    Filed: June 13, 2001
    Date of Patent: June 22, 2004
    Inventors: Peter Reimer, Jayesh Patel