Patents Represented by Attorney, Agent or Law Firm Peter M. Klett, Esq. - Justia Patents Search

Patents Represented by Attorney, Agent or Law Firm Peter M. Klett, Esq.

Self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature and structure formed thereby

Patent number: 6555880

Abstract: A semiconductor structure includes raised source and drain regions, where the raised source and drain regions are facet free and unconstrained to have a shape conforming to a same crystallographic axes with respect to each other.

Type: Grant

Filed: June 7, 2001

Date of Patent: April 29, 2003

Assignee: International Business Machines Corporation

Inventors: Cyril Cabral, Jr., Kevin Kok Chan, Guy Moshe Cohen, Kathryn Wilder Guarini, Christian Lavoie, Ronnen Andrew Roy, Paul Michael Solomon