Patents Represented by Attorney Pillsbury Winthdrop Shaw Pittman LLP

Find this attorney in the Justia Lawyer Directory

  • Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
    Patent number: 7866330
    Abstract: A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: January 11, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Bauke Jansen, Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong, Kornelis Tijmen Hoekerd