Abstract: A method of measuring a lithographic projection apparatus is described. The method includes imaging a verification mark of a patterning device onto a radiation-sensitive layer held by a substrate table of a lithographic apparatus, wherein the verification mark includes at least a first, a second and a third verification structure that have a mutually different sensitivity profile for a dose setting, a focus setting and a contrast setting.

Abstract: A lithographic apparatus is disclosed. The apparatus includes a source for supplying hydrogen radicals, a guide for use in conjunction with the source, for directing hydrogen radicals to an application surface to be targeted by the hydrogen radicals. The guide is provided with a coating having a hydrogen radical recombination constant of less than 0.2. In this way, the radicals can be transported with reduced losses and are able to better interact with remaining contaminants on application surfaces, such as mirror surfaces.

Abstract: A multi-optical-layer optical element of a lithographic projection apparatus in which at least one optical layer is comprised of an alloy of Mo and Cr. That layer may form the outer most layer of a Mo/Si layer system with an optional protective outer coating of Ru. Furthermore, the multi-optical-layer optical element may be comprised of a plurality of interposed between Mo/Cr alloyed layers.

Abstract: A vibration source driving device that realizes various vibration functions on portable telephones. The vibration source driving device includes a sound source for generating musical tone signals in response to music data. A vibration source to generate vibration, a driver to drive the vibration and a control circuit are further included such that the vibration source may be driven in synchronization with the rhythm signal within the music data.

Abstract: A focal-length adjusting unit for photographing apparatuses includes a distance-measuring means for detecting the amount of defocus to an object by using a light beam of the object passing through a photographing optical system; at least two optical elements located in an optical path for distance measurement, deflecting incident light from the object to introduce the light into an image sensor or a distance-measuring sensor; a variable optical-property element constituting at least one of the optical elements, capable of changing the deflection of light in accordance with an applied voltage or an applied current; and a voltage applying means or a current applying means for applying a voltage or a current in accordance with the distance-measuring output of the distance-measuring means. In this case, before a distance measurement is made by the distance-measuring means, the function of light deflection of the variable optical-property element is set to a predetermined value.