Patents Represented by Attorney Portkort Grether & Kelton LLP

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  • Single proof mass, 3 axis MEMS transducer
    Patent number: 6845670
    Abstract: A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
    Type: Grant
    Filed: July 8, 2003
    Date of Patent: January 25, 2005
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Andrew C. McNeil, Gary Li, Daniel N. Koury, Jr.