Patents Represented by Attorney, Agent or Law Firm Reed & Eherle LLP
  • Patent number: 6685983
    Abstract: Defect-free dielectric coatings comprised of porous polymeric matrices are prepared using nitrogen-containing polymers as pore-generating agents. The dielectric coatings are useful in a number of contexts, including the manufacture of electronic devices such as integrated circuit devices and integrated circuit packaging devices. The dielectric coatings are prepared by admixing, in a solvent, a polymeric nitrogenous porogen with a high temperature, thermosetting host polymer miscible therewith, coating a substrate surface with the admixture, heating the uncured coating to cure the host polymer and provide a vitrified, two-phase matrix, and then decomposing the porogen. The dielectric coatings so prepared have few if any defects, and depending on the amount and molecular weight of porogen used, can be prepared so as to have an exceptionally low dielectric constant on the order of 2.5 or less, preferably less than about 2.0.
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: February 3, 2004
    Assignee: International Business Machines Corporation
    Inventors: Craig Jon Hawker, James Lupton Hedrick, Elbert Emin Huang, Victor Yee-Way Lee, Teddie Magbitang, David Mecerreyes, Robert Dennis Miller, Willi Volksen