Patents Represented by Attorney Renner William Dover
  • Patent number: 8207037
    Abstract: A semiconductor component that includes a field plate and a semiconductor device and a method of manufacturing the semiconductor component. A semiconductor material includes an epitaxial layer disposed on a semiconductor substrate. A trench having an upper portion and a lower portion is formed in the epitaxial layer. A portion of a field plate is formed in the lower portion of the trench, wherein the field plate is electrically isolated from trench sidewalls. A gate structure is formed in the upper portion of the trench, wherein a gate oxide is formed from opposing sidewalls of the trench. Gate electrodes are formed adjacent to the gate oxide formed from the opposing sidewalls and a dielectric material is formed adjacent to the gate electrode. Another portion of the field plate is formed in the upper portion of the trench and cooperates with the portion of the field plate formed in the lower portion of the trench to form the field plate.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: June 26, 2012
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Hui Wang, Gennadiy Nemtsev, Yingping Zheng, Gordon M. Grivna