Abstract: Disclosed is a process for producing phosphorous trichloride, phosphorous pentachloride, or phosphorous tribromide by reacting phosphine gas with chlorine gas or bromine gas, in a mixture with hydrogen gas. The phosphine is dried and the reaction is performed at a temperature up to about 250° C. The phosphorous trichloride or phosphorous tribromide product can be reacted with oxygen to form phosphorous oxychloride or phosphorous oxybromide, respectively.