Abstract: A plasma deposition device 1 comprises electrodes 13 mounted on an electrode substrate 11, gas introducing holes 12 provided between said electrodes 13 for introducing material gas G to the interior, a deposition substrate 30 provided to oppose to said electrodes 13 from a predetermined distance d, and a power source 60 generating plasma from said material gas by providing energy thereto, wherein material gas G is resolved to active species R deposited on said deposition substrate 30, characterized in applying voltage to adjacent electrodes 13 so as to generate discharge DC.

Abstract: It is an object of the invention to provide a backing plate used for the sputtering apparatus and a sputtering method which can improve film deposition rate and film quality without increasing the size of the target with respect to the substrate. High sputtering power is applied to a target portion opposite to a location where a thin film is formed on a surface of a substrate, thereby a thin film having even film thickness and film quality can be formed without increasing the size of the target. Further, a cooling medium flow passage can eliminate temperature unevenness caused by different sputtering powers to be applied to a target surface. The problem caused by the temperature rise can be solved and the film deposition speed can be enhanced by increasing the sputtering power which can be applied to the target. Consequently, it is possible to improve productivity of the substrate.

Abstract: The present invention relates to a polycarbonate which can be obtained by a melting method and has a viscosity-average molecular weight of 16000 to 27000, and whose loss angle &dgr; and complex viscosity &eegr;* (Pa·s) measured under the conditions of 250° C. and an angular velocity of 10 rad/s satisfy the following relation (1): 4,700≦Tan &dgr;/(&eegr;*)−0.

Abstract: An oxide film is formed on an insulating substrate by means of a wet type film forming technique such as a sol-gel method, a chemical deposition method or a liquid phase deposition method. Next, the oxide film is patterned according to the shape of interconnections. Then, a metal film made of Ni is formed on an oxide film pattern by such a wet type film forming technique as a wet type plating method. Further, a metal film made of Au that has a low resistance is laminated on the metal film made of Ni by electroless plating, and a metal film made of Cu that has a low resistance and is low cost is laminated on the Au film by electroplating. Thus, by the above method for manufacturing electric interconnections, a large-area interconnection substrate for a display device and an image detector is able to be fabricated at low cost without using a vacuum film forming apparatus.

Abstract: A liquid crystal display element includes a pair of substrates made of plastic, a liquid crystal sandwiched between the pair of substrates, and a plurality of spacers for maintaining a gap d between the pair of substrates, which are sandwiched between the pair of substrates, and when x is an average value of thickness of the plurality of spacers in a state without a load in such a direction that the plurality of spacers are sandwiched between the pair of substrates, d<x≦1.1d is satisfied. Further, in the liquid crystal display element, a numerical density of the spacers is set to be not less than 240 pieces/mm2 and not more than 300 pieces/mm2. Further, in the liquid crystal display element, an elastic modulus of the spacers is set to be larger than that of the pair of substrates. As a result, in the liquid crystal display element, color shading is suppressed while suppressing generation of bubbles in a vacuum region and reduction in contrast, thus obtaining desirable display quality of a display image.

Abstract: The electron-source array of the present invention is provided with cathode electrodes placed on an insulation substrate in the form of lines; and gate electrodes that are placed face to face with the cathode electrodes with the insulation film being interpolated in between. In this arrangement, the cathode electrodes and the gate electrodes are arranged so as to intersect each other with a pore being formed at an intersecting portion between each cathode electrode and each gate electrode in a manner so as to penetrate the insulation film, and the pore is filled with a conductive material or a semiconductive material with the material being electrically connected to the corresponding cathode electrode, and is formed in a manner so as to separate from the gate electrodes with a space in between. Thus, it becomes possible to form very fine emitters uniformly without the need for a high-precision patterning technique and consequently to provide an electron-source array that enables an X-Y matrix driving process.

Abstract: There are disclosed a conductive antioxidant paint suitably used as an antioxidant material for a graphite electrode used in arc furnaces such as electric steel-making furnaces, and a graphite electrode coated with the conductive antioxidant paint.

Abstract: A management system for semiconductor fabrication devices is provided with a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line, and a determiner for monitoring the management information collected by the sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information. This enables to presume causes or the like of failures based on data, and hence, to immediately identify the causes of even sudden failures, thereby allowing measures to be immediately taken. Consequently, the process line can be stably operated.

Abstract: The present invention aims at reducing the number of scanning exposure and at enhancing throughput. the above-mentioned objective is achieved by allowing a substrate 14 to be placed in sideways with respect to a substrate holder 15a (placing the longer sides of the substrate in parallel to the shorter sides of the substrate holder) depending on the size of the apparatus and the size of the substrate 14. It is acceptable even when areas other than an effective exposure area of the substrate 14 should project out from the substrate holder.

Abstract: A liquid crystal device with a phase plate wherein three principal refractive indices na, nb, and nc of an index ellipsoid of the optical phase element have the relationship of na=nc>nb, a direction of the principal refractive index nb is tilted clockwise or counterclockwise from the normal of a surface of the optical phase element with respect to a direction of one of the principal refractive indices na and nc which is substantially parallel to the surface of the optical phase element as an axis, and a direction of the other principal refractive index nc or na is tilted clockwise or counterclockwise from a direction substantially parallel to the surface of the optical phase element, and at least one of rates of variation of an ordinary refractive index no and an extraordinary refractive index ne of a liquid crystal material of the liquid crystal layer with respect to a wavelength is set in a range in which viewing angle dependent coloring does not occur on a screen.

Abstract: The present invention relates to a process for producing a laminated sheet comprising an alumina fiber precursor, which process comprises spinning out an alumina fiber precursor from a solution mainly comprising an aluminum compound, falling and stacking said alumina fiber precursor on the surface of an accumulator to form a thin lamina sheet of alumina fiber precursor, continuously pulling out said lamina sheet from the accumulator, transferring the resultant lamina sheet to a folding device, and folding the sheet by a predetermined width while stacking the folded sheet and continuously moving the stacking sheet in the direction orthogonal to the folding direction.

Abstract: Disclosed are cutting blades for cutting tools and methods of making the blades. Such blades include tooth patterns with both set and non-set teeth. Each of the set teeth are set at an angle with respect to the jaw line of the blade, and each set tooth includes at least one surface feature that is effective to direct a portion of swarf that is produced via the cutting action of the blade into gullets of the blade such that less swarf overall is directed to the cutting surface of the objects being cut by the blade.

Abstract: A thermomagnetic recording medium includes a thermal change layer whose thermal conductivity is induced to change by a metal-to-insulator transition, is greater on a lower temperature side of a transition temperature and is smaller on a higher temperature side thereof. A thermomagnetic recording method includes setting a recording or reproducing temperature higher than the temperature of the recording medium at the circumference of a light spot and higher than a threshold temperature for change of the thermal conductivity of the thermal change layer. A thermomagnetic recording and reproducing device is provided with the above-mentioned thermomagnetic recording medium, an optical pickup and a magnetic head and conducts recording and reproduction by the above-mentioned thermomagnetic recording and reproducing device.

Abstract: An artificial tube for a nerve is disclosed that has a controlled rate of decomposition in the body such that the tube remains in the body until the nerve regenerates, which induces axons regenerated from severed nerve stumps to extend in the proper direction without pressing on the regenerated nerve following nerve regeneration and causes rapid restoration of blood flow by promoting infiltration of blood capillaries from the body to promote regeneration of the nerve, and which comprises a tube (10) or (20) having a coating layer (13) or (23) that is composed of gelatin or collagen on at least the outer surface of tube (11) or (21) that is composed of a material that is biodegradable and absorbable in vivo, wherein a pre-thermal dehydration crosslinking treated collagen fiber bundle (referring to a bundle fibers (31) composed of collagen) is inserted in its lumen along the axis of the tube (10) or (20), and wherein the fibers composed of collagen are coated with laminin.

Abstract: A method for depositing a functionally gradient thin film of the present invention includes the steps of: introducing two or more types of material gases into a process chamber which includes a cylindrical rotary electrode provided so as to be opposed to a substrate on which a thin film is deposited, the cylindrical rotary electrode being rotated by applying a high-frequency power thereto; and sliding the substrate into the process chamber while maintaining the rotation of the cylindrical rotary electrode so as to create plasma between the cylindrical rotary electrode arid the substrate for depositing the thin film.

Abstract: The present invention is intended to exactly extract a feature-region along its contour line without erroneously extracting any moving object other than the feature-region. An extraction signal from a feature-region main-portion extracting circuit is sent to a small region eliminating circuit whereby an erroneously extracted small region is detected and eliminated as an erroneously extracted noisy portion. The small region eliminating circuit compares a small region with four detection patterns, discriminates it as a region other than the feature (face)-region if no match is found and causes a center pixel of a window of 3×3 pixels to have a logical value of zero. An output of the small region eliminating circuit is sent to a blank filling circuit which compares its input with four detection patterns, discriminates it as a face-region if a match is found and makes a central pixel of a window of 13×13 pixels have a logical value of 1.