Patents Represented by Attorney, Agent or Law Firm Richard Pickreign
  • Patent number: 6827546
    Abstract: A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one upstanding pod door opening casting are self registering and allow frames for wafer fabrication systems of any normally desired configuration to be produced out of a small number of cast modules. More specifically, in a preferred embodiment, frames configured to mate with one to four commercially available loaders may be readily assembled out of the aluminum castings.
    Type: Grant
    Filed: August 19, 2002
    Date of Patent: December 7, 2004
    Assignee: Brooks-Pri Automation, Inc.
    Inventors: Rafael Gomez, Abdul Ghafar, Jonathan E. Borkowski, Kay Coghlan, Andres Cannavo, Rodney C. Ow
  • Patent number: 6813543
    Abstract: A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor is provided for calculating the location of the center and the notch of the wafer based on measurements by the sensor(s). Then, the control processor generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: November 2, 2004
    Assignee: Brooks-Pri Automation, Inc.
    Inventors: Martin Aalund, Steve Remis, Alexandra Lita, Guokun Ciu, Brian Loiler, Ray Rhodes
  • Patent number: 6789328
    Abstract: A semiconductor load port alignment device has a housing with a registration face and an alignment measurement face. A plurality of sensors are contained in the housing near the alignment measurement face. A processor is connected to the plurality of sensors.
    Type: Grant
    Filed: April 11, 2002
    Date of Patent: September 14, 2004
    Assignee: Brooks Automation, Inc.
    Inventors: Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Kamran Michael Farivar-Sadri
  • Patent number: 6779962
    Abstract: A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven by cables which in turn are driven by a drive which is positioned in an adjacent pressure vessel maintained at atmospheric pressure.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: August 24, 2004
    Assignee: Brooks Automation, Inc.
    Inventor: Dennis P. Poole
  • Patent number: 6769861
    Abstract: The effector of a robot is constructed with positioning pads at its distal end. The pads provide an accurate registration surface for engagement of the substrate. A pair of idler rollers, which slide along the longitudinal axis of the effector, is moved by an actuator into engagement with the substrate and the assembly urges the substrate against the positioning pads. A pair of wheels is mounted on a platform independent of the effector with one of the wheels driven by a motor. An optical sensor mounted with the wheels detects an orientation mark on the edge of the substrate and allows the driven wheel to rotate the substrate to its specified angular position.
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: August 3, 2004
    Assignee: Brooks Automation Inc.
    Inventor: Robert T. Caveney
  • Patent number: 6748280
    Abstract: A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, and storing at least one measurement of the process output in the database aligned with each process input using the timestamp. The method further includes iterating over the data in the database to estimate one or more coefficients for a model, and, if one or more measurements is missing, replacing the missing measurements based on a prediction from said model. The model is updated with said coefficient estimates. The method additionally includes iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, replacing the missing measurements based on prediction from the model. The model is updated with said process state estimate.
    Type: Grant
    Filed: June 14, 2002
    Date of Patent: June 8, 2004
    Assignee: Brooks Automation, Inc.
    Inventors: Jianping Zou, James A. Mullins, Keith A. Edwards
  • Patent number: 6736582
    Abstract: In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part.
    Type: Grant
    Filed: October 9, 2001
    Date of Patent: May 18, 2004
    Assignee: Brooks Automation, Inc.
    Inventors: Andreas Mages, Andreas Birkner, Alfred Schulz, Klaus Schultz
  • Patent number: 6737826
    Abstract: A substrate processing apparatus comprising a frame, a drive section, an articulated arm, and at least one pair of end effectors. The drive section is connected to the frame. The articulated arm is connected to the drive section. The articulated arm has a shoulder and a wrist. The arm is pivotally mounted to the drive section at the shoulder. The drive section is adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative the shoulder. The pair of end effectors is connected to the articulated arm. The pair of end effectors is pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist. Each end effector is independently pivotable relative to each other about the common axis of rotation at the wrist. At least one end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: May 18, 2004
    Assignee: Brooks Automation, Inc.
    Inventor: Ulysses Gilchrist
  • Patent number: 6725098
    Abstract: A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, storing at least one measurement of the process output in the database aligned with each process input using the timestamp, iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, predicting the missing measurements for the database based on a model, and determining an error for calculating a next process input, the error based on the data in the database.
    Type: Grant
    Filed: October 23, 2001
    Date of Patent: April 20, 2004
    Assignee: Brooks Automation, Inc.
    Inventors: Keith A. Edwards, Jianping Zou, James A. Mullins
  • Patent number: 6719517
    Abstract: A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame. The processing module is connected to the exterior of the frame. The processing module communicates with the first chamber of the frame through at least one of the outer openings. The substrate transport apparatus is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber formed therein. The second integral chamber communicates with the first chamber through an internal substrate transport opening of the frame. The second integral chamber of the frame has a selectable configuration from a number of predetermined configurations.
    Type: Grant
    Filed: December 4, 2001
    Date of Patent: April 13, 2004
    Assignee: Brooks Automation
    Inventors: David R. Beaulieu, Douglas R. Adams, Mitchell Drew, Peter Van Der Meulen
  • Patent number: 6721801
    Abstract: A method for providing data paths between a sending computer and a receiving computer. The method is comprised of steps of periodically receiving broadcasted data through a first subnet data path and through a second subnet data path, and reception of the broadcasted data on either of the subnets indicates status of the respective subnet. The method continues on to change local data routing tables in the sending computer and the receiving computer based upon the status of at least one of the subnets, providing high reliability in a peer-to-peer environment.
    Type: Grant
    Filed: December 26, 2000
    Date of Patent: April 13, 2004
    Assignee: Brooks Automation
    Inventor: Joseph N. Najjar
  • Patent number: 6719100
    Abstract: A horizontal door system is used in conjunction with an interfloor vertical transport system that penetrates an opening in a floor. The vertical transport system has vertical elements that define a fixed horizontal cross-section within the opening, and the door system includes a leading edge profile having a configuration matching the fixed horizontal cross-section of the vertical transport system. The door system is particularly suitable as a fire door system to seal upper and lower fire zones.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: April 13, 2004
    Assignee: PRI Automation, Inc.
    Inventors: Albert P. James, Jr., Joseph Reiss
  • Patent number: 6711731
    Abstract: In brief, the present invention provides a system for the interconnection of semiconductor fabrication tools (“process tools”) in a semiconductor fabrication facility by use of a data network and microprocessor based interface (“browser”) associated with each process tool. The data network and microprocessor based interface provide communication in accordance with known standards via Intranet or Internet data transfer links to one or more remotely disposed browsers. Data is immediately available in real time on all aspects of the operation of the fabrication facility. Equipment engineers and process engineers can browse the various process tools from any location. Host communications to and from the tools can be monitored without affect on factory operation. The interface is compatible with standard process tools and factory automation or management software systems.
    Type: Grant
    Filed: August 23, 2001
    Date of Patent: March 23, 2004
    Assignee: Pri Automation, Inc.
    Inventor: Mitchell Weiss
  • Patent number: 6673161
    Abstract: A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.
    Type: Grant
    Filed: July 3, 2001
    Date of Patent: January 6, 2004
    Assignee: Brooks Automation, Inc.
    Inventors: Tuan T. Ha, Hakan Elmali
  • Patent number: 6671570
    Abstract: A method for monitoring and assessing operation of a semiconductor fabrication facility comprises the steps of connecting a monitoring and assessment system to a system bus which is connected directly or indirectly to a manufacturing execution system and a plurality of semiconductor fabrication tools. Through a user interface, the state models can be configured for the semiconductor fabrication tools where each state model is based upon a set of defined triggers for each tool. During monitoring various messages are transmitted on the system bus between the semiconductor fabrication tools and the manufacturing execution system and the monitoring and assessment system, and appropriate triggers are generated based upon the messages where the triggers are selected from a set of defined triggers. During operation, the state models are updated for each tool affected by one of the triggers and transitions within the state models are recorded in a tracking database.
    Type: Grant
    Filed: October 16, 2001
    Date of Patent: December 30, 2003
    Assignee: Brooks Automation, Inc.
    Inventor: Bradley D. Schulze
  • Patent number: 6641348
    Abstract: A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: November 4, 2003
    Assignee: Brooks Automation GmbH
    Inventors: Klaus Schultz, Alfred Schulz, Marlies Mages
  • Patent number: 6632065
    Abstract: A substrate-handling robot comprises an arm drive mechanism with a first arm connected to it. A multiple substrate batch loader is connected to the first arm. The multiple substrate batch loader includes a set of vertically stacked substrate-handling paddles. A control circuit is connected to the arm drive mechanism. A vacuum control system is connected to the multiple substrate batch loader and the control circuit. The vacuum control system includes a set of vacuum control valves corresponding to the set of vertically stacked substrate-handling paddles. The set of vacuum control valves includes a selected vacuum control valve for a selected substrate-handling paddle. A set of vacuum sensors is connected to the set of vacuum control valves. The set of vacuum sensors includes a selected vacuum sensor corresponding to the selected vacuum control valve. The selected vacuum sensor provides a substrate-absent signal when a substrate is not present at the selected substrate-handling paddle.
    Type: Grant
    Filed: June 23, 2000
    Date of Patent: October 14, 2003
    Assignee: Equipe Technologies
    Inventors: James A. Cameron, Steven G. Reyling
  • Patent number: 6619359
    Abstract: The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: September 16, 2003
    Assignee: Brooks Automation, Inc.
    Inventors: Shane P. Ballard, Robert J. Viola, Carl E. Merkel, Robert Teissler
  • Patent number: 6609876
    Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: August 26, 2003
    Assignee: Brooks Automation, Inc.
    Inventors: Andreas Mages, Werner Scheler, Herbert Blaschitz, Alfred Schulz, Heinz Schneider