Patents Represented by Attorney, Agent or Law Firm Rob Wallace
  • Plasma reactor with coil antenna of interleaved conductors
    Patent number: 6369349
    Abstract: The invention is embodied in a coil antenna for radiating RF power supplied by an RF source into a vacuum chamber, the coil antenna including plural helical conductors each having a first end and a second end, the first ends being adapted for connection to a first common RF potential, the second ends being adapted for connection to a second common RF potential, each of the plural conductors being wound about a common axis of helical symmetry, each of the second ends being spaced substantially equally from the axis and from each other.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: April 9, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Xue-Yu Qian, Arthur H. Sato