Patents Represented by Attorney, Agent or Law Firm Robert C. Laurenson
  • Rapid and accurate end point detection in a noisy environment
    Patent number: 6172756
    Abstract: Methods and apparatus for film measurement and endpoint detection in a noisy environment, such as CMP processing of semiconductor wafers, are disclosed, characterized by the use of spectral analysis of intensity data derived from light reflected off the sample to estimate film thickness or detect an endpoint condition.
    Type: Grant
    Filed: December 11, 1998
    Date of Patent: January 9, 2001
    Assignee: Filmetrics, Inc.
    Inventors: Scott A. Chalmers, Randall S. Geels