Abstract: A dual etch process for forming an air bearing slider design with three etch depths. For one embodiment the first etch forms the leading and trailing step regions and the second etch forms the lateral step regions. The combination of the first and second etches form the negative pressure region.
Type:
Grant
Filed:
May 14, 1997
Date of Patent:
December 21, 1999
Assignee:
International Business Machines Corporation
Inventors:
Lee Kevin Dorius, Sanford Anthony Bolasna