Abstract: A simplified DSCP process makes non-self-aligned floating gate semiconductor memory cells of the FLOTOX EEPROM type as incorporated to a cell matrix having control circuitry associated therewith, wherein each cell has a selection transistor associated therewith. The process includes at least the following steps: growing or depositing a gate dielectric layer of the selection transistor and the cell; tunnel masking to define the tunnel area with a dedicated etching step for cleaning the semiconductor surface; growing the tunnel oxide; depositing and doping the first polysilicon layer poly1.
Abstract: Presented is an integrated circuit structure having a power transistor in a first well and control circuitry in another well. Between the power and control regions is an intermediate region including a biaging circuit secured to prevent flow of parasitic current from the wells into the substrate by biasing the intermediate region at a value of potential which is tied to the value of potential of the first well. The biasing circuit can include a bipolar transistor.
Abstract: A process for manufacturing a MOS transistor and especially a MOS transistor used for non-volatile memory cells is presented. At the start of the manufacturing, a semiconductor substrate having a first type of conductivity is covered by a gate oxide layer. A gate electrode is formed over the gate oxide layer, which is a stacked gate when the MOS transistor is used in a non-volatile memory. Covering the gate electrode is a covering oxide that is formed over the gate oxide layer, the gate electrode, and around the gate electrode. Next, a dopant of a second type of conductivity is implanted to provide implant regions adjacent to the gate electrode. Subjecting the semiconductor to thermal treatments allows the implanted regions to diffuse into the semiconductor substrate under the gate electrode and form a gradual junction drain and source region of the MOS transistor.
Type:
Grant
Filed:
December 28, 1999
Date of Patent:
June 26, 2001
Assignee:
STMicroelectronics S.r.l.
Inventors:
Claudio Brambilla, Sergio Manlio Cereda, Paolo Caprara