Patents Represented by Attorney, Agent or Law Firm Robert Nathan
  • Patent number: 6379510
    Abstract: A method of making a micro-mirror light beam switch having a thin flexible movable support member for supporting a thin central reflective mirror surface thereon and for supporting a plurality of thin unimorph piezoelectric cantilevered mirror actuators mechanically coupled between a fixed substrate and movable hinging portions of the thin movable support member. The method employs thin film deposition techniques and photolithography for readily forming the extremely thin switch, whereby the components thereof are substantially co-planar for precisely controlled, multi-axial micro-mirror motion and low voltage operation necessary for the rapid switching of optical traffic from fiber to fiber in the next-generation optical networks.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: April 30, 2002
    Inventors: Jonathan S. Kane, Gareth A. Hughes