Patents Represented by Attorney, Agent or Law Firm Robert W. Becker & Asscoiates
  • Method for the removing of adsorbed molecules from a chamber
    Patent number: 6830631
    Abstract: A method of removing first molecules adsorbed on the surfaces of a chamber and/or at least one object found in the chamber is provided. Second, polar molecules that have a desorptive effect on the first molecules are introduced into the chamber. The second molecules comprise nitrogen and hydrogen, and especially NH3 molecules.
    Type: Grant
    Filed: September 25, 2002
    Date of Patent: December 14, 2004
    Assignee: Steag RTP Systems GmbH
    Inventors: Zsolt Nenyei, Wilfried Lerch, Jürgen Niess, Thomas Graf