Abstract: A structure for testing external connections to semiconductor devices. The structure includes an external electrical path between selected external connections on the semiconductor devices.
Type:
Grant
Filed:
January 4, 2002
Date of Patent:
May 4, 2004
Assignee:
International Business Machines Corporation
Abstract: The distribution of ultraviolet light irradiated from an illumination source to optical elements of a projection exposure device is varied by an illumination aperture. The illumination aperture is formed with a plurality of openings which may be opened or closed independently to the passage of irradiating light. The size and shape of the opening formed by the plurality of openings of the illumination aperture is determined according to the particular image to be projected.
Type:
Grant
Filed:
August 30, 1999
Date of Patent:
July 31, 2001
Assignee:
International Business Machines Corporation
Inventors:
Orest Bula, Daniel C. Cole, Edward W. Conrad, David Vaclay Horak, Jed Hickory Rankin
Abstract: A method for sorting integrated circuit chips. At least one physical defect is detected in the semiconductor chips. The semiconductor chips are sorted based upon the physical defect.
Type:
Grant
Filed:
October 29, 1998
Date of Patent:
April 24, 2001
Assignee:
International Business Machines Corporation
Inventors:
Robert F. Cook, Eric G. Liniger, Ronald L. Mendelson, Dean R. Sanders