Abstract: A surface-coated nanoporous silica dielectric film that is prepared by a process comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric film with a coating composition comprising a polymer precursor, under conditions effective to form a strength-enhancing and/or hydrophobicity enhancing layer on the treated nanoporous silica dielectric film.
Type:
Grant
Filed:
August 23, 1999
Date of Patent:
November 20, 2001
Assignee:
AlliedSignal Inc.
Inventors:
Nicole Rutherford, James S. Drage, Ron Katsanes, Hui-Jung Wu, Teresa Ramos
Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.
Type:
Grant
Filed:
November 22, 2000
Date of Patent:
November 20, 2001
Assignee:
AlliedSignal, Inc.
Inventors:
Neil Hendricks, Douglas M. Smith, Teresa Ramos, James Drage
Abstract: A process for increasing the etch resistance of photoresists, especially positive working 193 nm sensitive photoresists which are suitable for use in the production of microelectronic devices such as integrated circuits. A 193 nm photosensitive composition is coated onto a substrate, exposed to activating energy at a wavelength of 193 nm to decompose the polymer in the imagewise exposed areas; and developed to remove the exposed nonimage areas. Then the image areas are exposed to sufficient electron beam radiation to increase the resistance of the image areas to an etchant.
Abstract: The invention provides processes for the formation of structures in microelectronic devices such as integrated circuit devices. More particularly, the invention relates to the formation of vias, interconnect metallization and wiring lines using multiple low dielectric-constant inter-metal dielectrics. The processes use two or more dissimilar low-k dielectrics for the inter-metal dielectrics of Cu-based dual damascene backends of integrated circuits. The use of both organic and inorganic low-k dielectrics offers advantages due to the significantly different plasma etch characteristics of the two kinds of dielectrics. One dielectric serves as the etchstop in etching the other dielectric so that no additional etchstop layer is required. Exceptional performance is achieved due to the lower parasitic capacitance resulting from the use of low-k dielectrics.
Abstract: The invention pertains a bathymetric sonar system involving a single swept transmit beam projector system which compensates for ship attitude and positioning changes. A sonar transducer array has a matrix of acoustic projector elements arranged in a plurality of substantially parallel rows and a plurality of substantially parallel columns; and means for causing each of the projector elements to generate an acoustic signal at a frequency and phase independently from each other projector element. Preferably the transducer array is operated by causing the projector elements to generate an acoustic signal at a frequency and phase independently from each other projector element, at a frequency and phase which is initially the same as the frequency and phase of each other element in its column and such that the frequency and phase of the projector elements in each column is different from each other column. Thus a single swept beam is projected toward the ocean floor.
Abstract: An improved transducer arrangement for low frequency sonar projectors that convert electric signals to mechanically generated acoustic signals. In one embodiment the arrangement has both a convex flextensional transducer and a concave flextensional transducer. An open side of the convex transducer is attached to an open side of the concave transducer by an intermediate bulkhead which closes each of the attached open sides. An end plate is attached to another open side of the convex transducer and another end plate is attached to another open side of the concave transducer such that the end plates close the attached open sides. In another embodiment, transducer assembly has a convex transducer having end plates and a concave transducer having end plates. Either one of the endplates of the concave transducer is attached to one of the endplates of the convex transducer, or an endplate of the concave transducer is also an endplate of the concave transducer.
Abstract: A generally cylindrical hydrophone configuration provides compensation for longitudinal accelerations by placing four identical solid piezoelectric transducer elements along its axis with each transducer element being bonded to a head member, two of which are located generally centrally of the cylindrical housing and fastened thereto and two of which are located near the outside edges of the housing and having slight clearance therewith. Flexible polyurethane boots are clamped to the ends of the housing. The volumes between the centrally disposed and outer transducer head members and between the outer head members and the boots are filled with methyl silicon fluid. Each head member is electrically connected to one side of the electrical output, and the junction between the transducer members is connected to the opposite side, both sides being wired to an electrical contact plate located between the two centrally disposed transducer head members, this volume being filled with electrical potting material.
Abstract: The invention pertains to dielectric films for the production of microelectronic devices. A relatively stabile fluorinated silicate glass film is produced by depositing a fluorinated silicate glass film onto a substrate and then exposing the fluorinated silicate glass film to electron beam radiation. The electron beam exposing step is conducted by overall exposing the dielectric layer with a wide, large beam of electron beam radiation from a large-area electron beam source.
Abstract: A dry film coating composition used to make a bright white film coating for nutritional supplements, pharmaceutical tablets, and the like, comprises dextrose, an auxiliary film-former, and titanium dioxide. Optionally, but advantageously, the coating composition also ay include one or more of the following components: a plasticizer, a surfactant, a flow aid, and a preservative.
Type:
Grant
Filed:
January 5, 2001
Date of Patent:
July 31, 2001
Assignee:
BPSI Holdings, Inc.
Inventors:
Susan M. Grillo, Brian Korchok, Bruce Kinsey, Melanie Hartman, Stuart C. Porter, Rita Steffenino, George Reyes, Thomas J. Burke
Abstract: An apparatus for conducting multiple thin layer chromatographic processes including an array of receptacles, each receivable of chromatographic fluid, a support structure for supporting the receptacles, and a retaining unit for retaining thin layer chromatographic plates while enabling each plate to be inserted into and removed from a respective receptacle. In use, one or more samples of interest are spotted onto multiple thin layer chromatography plates, the chromatography receptacles are filled with a suitable amount of a chromatography solvent, the plates are inserted into respective chambers to begin the chromatography process and the processes are allowed to continue for a sufficient time period for sample separation to occur. Any separated samples are readily visualized and detected.
Abstract: This invention relates to positive working, peel apart, photopolymerizable sheet constructions which, upon exposure to an actinic radiation source through a screened image, can accurately reproduce said image. The construction is useful as a color proofing film which can be employed to accurately predict the image quality from a lithographic printing process. The method applies an adhesive to a temporary support and then laminates it to a receiver with removal of the temporary support. A photosensitive layer on a support is laminated to the adhesive, exposed, and peeled apart to form a positive image. Additional adhesive layers and photosensitive layers are similarly processed to provide a full color reproduction.
Abstract: A process for forming T-shaped metal contacts on a dielectric substrate. The process includes deposition of first and second photoresist layers onto a substrate; individually overall electron beam exposure of both layers; with subsequent imagewise UV exposure and development of both layers to form hollow cavities in the layers. By concentrating the electron beam radiation on the mid-point in the thickness of each photoresist layer, the radiation is distributed throughout each layer, resulting in solubility properties which lead to the formation of hollow cavities of a certain desired shape. In one embodiment of the invention, three-dimensional structures are formed in the photoresist layers by filling the hollow cavities with metal. Subsequent removal of unwanted portions of the photoresist layers produces a dielectric substrate having T-shaped metal contacts on its surface.
Abstract: An improved mechanical seal of the type useful to form a seal between a stationary housing and a rotatable shaft having a shaft axis extending through an opening in the housing. The mechanical seal has stationary components and rotatable components. The stationary components comprise a stationary seal element having a stationary seal surface and the rotatable components comprise a rotatable seal element having a rotatable seal surface. The stationary and rotatable seal surfaces have substantially equal and oblique, preferably, acute, angles to the shaft axis. The seal surfaces oppose each other and are forced together to form a seal. The seal can be secured in place by improved connector clips.
Abstract: Polymeric compounds of the formula:
(D)n—M—(R1)m (I)
wherein
(m) and (n) independently selected positive integers, preferably from about 1 to about 6 each;
D is a residue of a biologically active moiety;
M is a multifunctional linker/spacer moiety; and
R1 is a polymer residue are disclosed. Methods of preparing the same and methods of treatment using the same are also included as part of the present invention.
Type:
Grant
Filed:
April 15, 1999
Date of Patent:
June 26, 2001
Assignee:
Enzon, Inc.
Inventors:
Richard B. Greenwald, Anthony J. Martinez, Yun H. Choe, Annapurna Pendri
Abstract: A dry film coating composition used to make a bright white film coating for nutritional supplements, pharmaceutical tablets, and the like, comprises dextrose, an auxiliary film-former, and titanium dioxide. Optionally, but advantageously, the coating composition also may include one or more of the following components: a plasticizer, a surfactant, a flow aid, and a preservative.
Type:
Grant
Filed:
July 16, 1997
Date of Patent:
June 19, 2001
Assignee:
BPSI Holdings, Inc.
Inventors:
Susan M. Grillo, Brian Korchok, Bruce Kinsey, Melanie Hartman, Stuart C. Porter, Rita Steffenino, George Reyes, Thomas J. Burke
Abstract: The invention pertains to a hopper loader apparatus for separating and forming an overlapping shingled stream of individual signatures of sheet materials from a vertically aligned, parallelepiped shaped stack of such signatures for subsequent handling operations. The hopper loader has a slippage resistant belt which engages a bottom edge of each signature and assists in preventing the signatures from slipping by keeping them upstanding. Preferably the slippage resistant belt has an array of projections extending upwardly from a belt surface which secures the signatures in place. This produces a smooth, regular, even signature stream. Individual signatures flow reliably, one-by-one off of the downward conveyor to another conveyor.
Abstract: A process for forming a photoresist image on a substrate and a process for forming metal contacts on a substrate are described. The process of forming a photoresist image includes depositing a positive working photoresist composition onto a metal layer which is on a substrate to thereby form a photoresist layer then imagewise exposing the photoresist layer to actinic radiation and developing said photoresist layer to form a plurality of cavities through the photoresist layer thereby revealing portions of the metal layer. Then the inventions provides for etching away the revealed portions of the metal layer followed by an overall exposing both the substrate and the remaining photoresist layer and remaining metal layer portions to sufficient electron beam radiation to render a part of the photoresist layer directly adjacent to the metal layer more soluble in a developer than the balance of the photoresist layer.
Abstract: A tractor rake attachment is disclosed that includes a rake platform, the rake platform having a plurality of tines secured to a rake platform with the tines having a length that extend perpendicular to the rake platform. The tines are approximately evenly spaced along the length of the rake platform and have a depth that permits elastic deformation of the tine when contacted by ta heavy rock. The tines on the rake platform may be forwardly adjusted to create a angle along the rake platform in relation to the movement of a tractor rake. The rake platform is capable of being attached to a tractor rake so that the horizontal length of the tractor rake is extended with the tines extending in a downward direction from the rake platform to the ground. A method for light and medium field grading also is disclosed.