Abstract: Adsorption process for recovering ozone from a feed gas mixture containing at least ozone and oxygen comprising (a) introducing the feed gas mixture into a first end of an adsorber vessel containing a zeolite adsorbent and selectively adsorbing ozone on the adsorbent; (b) withdrawing from a second end of the vessel a stream of oxygen essentially free of ozone; (c) terminating the flow of the feed gas mixture, introducing a purge gas into the second end of the vessel, and withdrawing from the first end of the vessel an outlet gas mixture containing at least purge gas and desorbed ozone; and (d) introducing an additional component into the feed gas mixture and/or the purge gas and adsorbing the additional component on the zeolite adsorbent. The additional component when adsorbed reduces the decomposition of ozone that would occur in the absence of the additional component adsorbed on the zeolite adsorbent.

Abstract: Fluid flow valve assembly comprising a valve body having an external port and an inlet end having at least a first port, a second port, and a third port; a first valve disposed within the valve body and adapted to control fluid flow between the first and second ports; and a second valve disposed within the valve body and adapted to control fluid flow between the third port and the external port.

Abstract: A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.