Abstract: Apparatus and method for improved heating uniformity during rapid thermal annealing through the use of a sacrificial layer covering the surface to be annealed. The composition and thickness of the layer are chosen to be opaque at the frequencies emitted by a radiant energy source, usually a xenon arc lamp, and also to be thermally conductive. The sacrificial layer absorbs the radiant energy and conducts the resulting heat to the surface to be annealed. After the annealing is complete, the sacrificial layer is etched away or left as an overcoat.
Abstract: A hydraulic pulse dampener has two diaphragms, each positioned opposite a recess formed in the housing. The regions between the diaphragms and the associated recesses are sealed from the fluid which flows through the dampener so that a rise in pressure in the fluid may cause each diaphragm to flex towards the recess behind until it may completely nest in it. The diaphragms are designed differently so that they will begin to flex and take a completely nested position in different pressure ranges.
Abstract: A hydraulic pulse dampener of liquid compressibility type has a flexible tubing wound around a form within a liquid-tight housing filled with a compressibility liquid and a stiff diaphragm placed adjacent a recess formed in a receiving member. As the fluid flowing inside the tubing experiences pressure pulses, the walls of the tubing expand and transmit the pulse energy through the compressibility liquid and causes the diaphragm to gradually flex towards the recess until it may completely nest in it. The recess in the receiving member preferably has a central flat portion so that the flexing diaphragm will first contact the receiving member at the center and the nesting will spread outwardly therefrom.
Abstract: In an image tube, a photocathode is disposed to receive a photon image for emitting into the tube a corresponding electron image which is accelerated by an accelerating anode and focused upon an output device, such as a fluorescent screen or a microchannel electron multiplier. A gating electrode is interposed along the beam path between the anode and the output device. The potential difference between the photocathode and the gating electrode is periodically pulsed such that the gating electrode is sufficiently negative relative to the potential of the photocathode for reflecting the image electrons passing through the anode back to the anode for collection thereof and thus for gating off the electron image to the output device. This potential difference may be pulsed by pulsing the photocathode positive with respect to the gating electrode or by pulsing the gating electrode negative with respect to the photocathode.
Type:
Grant
Filed:
February 11, 1974
Date of Patent:
January 20, 1976
Assignee:
Varian Associates
Inventors:
Richard S. Enck, Jr., James P. Sackinger