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Patents Represented by Attorney Scheinberg & Associates
Patents Represented by Attorney Scheinberg & Associates
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Dual beam system
Patent number:
8183547
Abstract:
A dual beam system provides for operation of a focused ion beam in the presence of a magnetic field from an ultra-high resolution electron lens. The ion beam is deflected to compensate for the presence of the magnetic field.
Type:
Grant
Filed:
May 27, 2010
Date of Patent:
May 22, 2012
Assignee:
FEI Company
Inventor:
Tom Miller