Patents Represented by Attorney Scheinberger & Griner, LLP

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  • Repetitive circumferential milling for sample preparation
    Patent number: 7442924
    Abstract: A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts impinge on the sloping sidewalls formed by previous cuts. The high angle of incidence provides a greatly enhanced mill rate, so that making multiple overlapping cuts to produce a wide trench can requires less time than making a single, deep cut around the perimeter of a sample.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: October 28, 2008
    Assignee: FEI, Company
    Inventors: Lucille A. Giannuzzi, Paul Anzalone, Richard Young, Daniel W. Phifer, Jr.