Patents Represented by Attorney, Agent or Law Firm Scott C. Kriegar
  • Single c-axis PGO thin film electrodes having good surface smoothness and uniformity and methods for making the same
    Patent number: 6586260
    Abstract: A method of forming an electrode and a ferroelectric thin film thereon, includes preparing a substrate; depositing an electrode on the substrate, wherein the electrode is formed of a material taken from the group of materials consisting of iridium and iridium composites; and forming a single-phase, c-axis PGO ferroelectric thin film thereon, wherein the ferroelectric thin film exhibits surface smoothness and uniform thickness.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: July 1, 2003
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Fengyan Zhang, Jer-Shen Maa, Wei-Wei Zhuang, Sheng Teng Hsu