Abstract: A monolithic temperature and pressure transducer having a plurality of capacitive sensors. The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients.
Type:
Grant
Filed:
August 21, 1995
Date of Patent:
September 2, 1997
Assignee:
Moore Products Co.
Inventors:
James O. Moore, Raymond H. Kohler, Philip R. Klauder