Abstract: An exposure method of illuminating a pattern on a mask by a light beam from an illuminating optical system and exposing the image of the pattern onto a photosensitive substrate through a projection optical system comprises the steps of discriminating the kind of the mask, setting the state of at least one of the field stop of the illuminating optical system, the aperture stop of the illuminating system and the aperture stop of the projection optical system in conformity with the discriminated kind of the mask, and projecting the image of the pattern on the mask onto a predetermined area of the photosensitive substrate.

Abstract: In a zoom lens having a negative lens unit and a positive lens unit, a first lens unit G1 has, in succession from the object side, a first negative meniscus lens component L11 having its concave surface facing the image side, a second negative lens component L12 and a third positive lens component L13 having a convex surface facing the object side, a second lens unit G2 has, in succession from the object side, a first positive lens component L21, a second positive lens component L22, a third negative lens component L23 and a fourth positive lens component L24 separated from one another, at least one of the lens surfaces of the first negative meniscus lens component L11 and second negative lens component L12 in the first lens unit G1 is formed into an aspherical shape, and predetermined conditional expressions are satisfied.

Abstract: A camera includes a photo-taking lens, an automatic focus adjusting device for effecting the automatic focus adjustment of the photo-taking lens, an eye-gaze detecting device for detecting the photographer's eye-gaze position in a finder field corresponding to a photographing picture plane, and producing an eye-gaze detection signal corresponding to the eye-gaze position, a focus adjustment signal producing device for outputting a plurality of focus adjustment signals corresponding to a plurality of detection areas in the photographing picture plane, and a control signal producing device for producing a control signal for controlling the automatic focus adjusting means, on the basis of the eye-gaze detection signal and the focus adjustment signals.

Abstract: There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.

Abstract: A zoom lens system comprises, in the following order from the object side, a first lens group with a negative refractive power and a second lens group with a positive refractive power. When changing the focal length, the distance of an air space between the first lens group and the second lens group is changed. The second lens group has a front group with a positive refractive power and a rear group with a negative refractive power. An image position is changed by shifting at least one lens element of the front group of the second lens group along a direction transverse to the optical axis.

Abstract: An apparatus for detecting positions is provided with an auxiliary pattern adjacent to the opaque portion of an index pattern, which has a spatial frequency higher than the insulating spatial frequency of an imaging system in order to obtain a stable signal portion (slope). Using this slope, the positional information of the index pattern is obtained, and on the basis of the positional information, the positions of wafer alignment marks are detected.

Abstract: The invention relates to a safety device that ensures longitudinal sealing of the shaft of a primary pump following the rupture of one of the seals separating the high-pressure chamber from the low-pressure chamber of the fluid in the pump, the device made up of a hollow piston comprising an upstream side part of outer diameter D1, and a downstream side part of outer diameter D3, greater than D1, the piston coaxially surrounding the shaft and being placed in a chamber made in the seal housing, the device also comprising activation means which axially move the piston against the shaft when a seal ruptures, wherein two annular chambers are made on the downstream side of the piston, the first, whose outer diameter D2 is greater than D1, communicating with the low-pressure chamber.

Abstract: An automatic focusing camera system has a lens barrel with a focusing optical system, and a camera body. A focus detecting device in the camera body outputs a focus detecting signal. A calculating device in the camera body calculates driving information of the focusing optical system based upon the focus detecting signal. A driving device in the lens barrel has a driving power source and a transmission member for transmitting driving power to the focusing optical system to drive it based upon the driving information. First and second signal generators in the lens barrel, at respective final and initial stages of the transmission member, generate first and second driving signals in response to driving of the focusing optical system. A driving control device in the lens barrel controls position of the focusing optical system based upon the first driving signal and the driving information, and controls velocity of the driving power source based upon the second driving signal.

Abstract: A lens barrel which can be easily switched between a manual focusing mode and an auto-focusing mode employs a motor as a drive power source for driving a switching apparatus for switching between an auto-focusing apparatus and a manual focusing apparatus. When a photographer supplies an external electrical signal, a switching operation from the auto-focusing apparatus to the manual focusing apparatus and vice versa can be performed in accordance with the forward/reverse rotational direction of the motor.

Abstract: A projection exposure method and apparatus are disclosed, which can perform a focusing operation with respect to a partly omitted shot exposed at a peripheral portion of a photosensitive substrate such as a wafer. In the projection exposure method and apparatus, when a prohibition band having a predetermined width is set from the edge of the substrate, and exposure is to be performed with respect to a shot area having a portion located only within the prohibition band and the remaining portion located outside the edge of the substrate, a focus detection point is shifted to the boundary line of the prohibition band on the substrate, and a focusing operation is performed. Thereafter, the focus detection point is moved to an original target shot exposure position to perform exposure.

Abstract: A focus detecting apparatus for detecting the focus of a photo-taking lens comprises a condenser lens disposed near the predetermined image plane of an object formed by the photo-taking lens, and a plurality of focus detection systems. Each of the focus detection systems comprises pupil dividing means disposed rearwardly of the condenser lens in the direction of the optical axis thereof and having at least one pair of openings for dividing the pupil of the photo-taking lens, at least one pair of re-imaging lenses disposed rearwardly of the pupil dividing means correspondingly to the at least one pair of openings for forming at least one pair of secondary images, and a photoelectric conversion element array having picture elements for detecting the amount of deviation of the relative position of the secondary images.

Abstract: A camera capable of operating in a red-eye prevention mode. The camera has an electronic flash device which is activated by a drive circuit in synchronization with the exposure. The electronic flash device also serve as a pre-light-emission device capable of performing pre-light-emission for the purpose of preventing red-eye effect. When it is judged from the photographing condition that red-eye effect may occur, a controller activates the electronic flash device to effect a pre-light-emission for reducing the size of pupils of eyes of a person to be photographed, before the main flashing which is executed in synchronization with the exposure.

Abstract: A focus detecting method includes the step of projecting the real image of an observation object including a plurality of object patterns onto an image pickup device through an optical system and producing image data from an output of the image pickup device, the step of calculating correlation values of the image data of each of the plurality of object patterns and the image data of a prestored reference pattern while varying the relative positional relation among the image pickup device, the optical system and the observation object in the direction of the optical axis of the optical system, and the step of judging a relative positional relation giving the maximum correlation value as an in-focus state. An apparatus is provided for carrying out the above-described focus detecting method.

Abstract: The size along an optical axis of a camera with a built-in magnetic head is reduced by arranging a magnetic head and a pad to be used for writing magnetic information radially externally of a bodytube, the pad being accommodated in a notch formed in the camera body so as to permit the bodytube to be retracted to a position close to a film.

Abstract: Novel preset, calibrated stud bolts and spring-loaded nut assemblies with torque-off spline tips for securing structural conduit units and the like, and method of calibrating the same.

Abstract: An exposure apparatus for exposing a pattern on a substrate to be exposed having a predetermined mark formed thereon includes a stage for supporting the substrate to be exposed thereon, moving means capable of moving the stage in a direction along a predetermined surface, mark detecting means for applying a light beam to the substrate to be exposed and detecting the predetermined mark, position detecting means outputting a position signal conforming to the position of the stage on the predetermined surface, producing means for detecting information regarding rotation of the stage along the predetermined surface and producing an information signal, and correcting means for correcting on the basis of the information signal the position signal when the mark detecting means detects the predetermined mark.

Abstract: This disclosure involves an improved thin surface-marking strip for adhering to a road surface or the like, employing novel flattened somewhat saw-tooth wedges embodying retroreflective material and of preferably substantially trapezoidal shape, with rather critical separations between wedges relative to height and length of the wedges to obviate shadow effects, provide improved daylight observation, and to increase effectiveness and life, particularly under conditions of rain-covered surfaces and snow removal.

Abstract: The invention pertains to a logic circuit with threshold and built-in safety such that any change in the characteristics of its components produces a relative increase of the threshold value. It comprises a comparator (7) one input of which receives a reference d-c voltage (VR) whereas the other input is connected to the junction point of a first and a second resistance (1, 2). A first d-c voltage (V1) of low relative value is applied to the free terminal of the first resistance (1), and a second d-c voltage (V2) of high relative value is applied to the free terminal of the second resistance (2) by means of a third resistance (3). According to the invention, there is applied at the junction point (A) of the second and third resistances (2, 3) a third d-c voltage (V3) of intermediate relative value by means of a fourth resistance (4) in series with a chopping commutator (6).