Patents Represented by Attorney Shelley A. Stafford

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  • Maskless laser writing of microscopic metallic interconnects
    Patent number: 5459098
    Abstract: A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.
    Type: Grant
    Filed: October 19, 1992
    Date of Patent: October 17, 1995
    Assignee: Marietta Energy Systems, Inc.
    Inventor: Leon Maya