Patent number: 6318183
Abstract: A multiple element sensor for sensing pressure, the sensor has a substrate 201 with a diaphragm portion 203. Multiple sensing elements 205, 207, 209, 211 are each disposed on the diaphragm portion 203 of the substrate 201. These sensing elements 205, 207, 209, 211 each have output terminals 231, 232, 233, 234, 235, 236, 237, 238 providing signals 371, 373, 375, 377 indicative of the pressure. A combining circuit 217 has input terminals 337, 339, 341, 343 each coupled to the output terminals 231, 232, 233, 234, 235, 236, 237, 238 of each of the sensing elements 205, 207, 209, 211 respectively. The combining circuit 217 has a combined output terminal 219 for providing an output signal 345 dependent on the plurality of signals 371, 373, 375, 377. By fabricating this structure different pressure sensor ranges can be selected depending on how many of the sensing elements 205, 207, 209, 211 are selected by the combining circuit 217.
Type:
Grant
Filed:
December 22, 1998
Date of Patent:
November 20, 2001
Assignee:
Motorola, Inc.
Inventor:
Walter Czarnocki