Patents Represented by Attorney, Agent or Law Firm Skjerven Morill LLP
  • Patent number: 6423923
    Abstract: A plasma apparatus separately measures multiple plasma jets upstream of where the plasma jets converge into a combined plasma stream. The separate plasma jets can be separately adjusted to place the separate jets in a configuration that provides the combined stream with desired properties for a plasma treatment. The system can include an injector for a neutral jet that becomes part of the combined plasma stream. With an injector, the positions of the plasma jets can be measured relative to the injector so that the plasma jets and the neutral jet are properly aligned to form a combine plasma stream having the properties desired.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: July 23, 2002
    Assignee: Tru-Si Technologies, Inc.
    Inventor: Oleg Siniaguine